Robotics for Electronics Manufacturing: Principles and Applications in Cleanroom AutomationCambridge University Press, 6 мая 2010 г. - Всего страниц: 238 Understand the design, testing, and application of cleanroom robotics and automation with this practical guide. From the history and evolution of cleanroom automation to the latest applications and industry standards, this book provides the only complete overview of the topic available. With over 20 years' industry experience in robotics design, Karl Mathia provides numerous real-world examples to enable you to learn from professional experience, maximize the design quality and avoid expensive design pitfalls. You'll also get design guidelines and hands-on tips for reducing design time and cost. Compliance with industry and de-facto standards for design, assembly, and handling is stressed throughout, and detailed discussions of recommended materials for atmospheric and vacuum robots are included to help shorten product development cycles and avoid expensive material testing. This book is the perfect practical reference for engineers working with robotics for electronics manufacturing in a range of industries that rely on cleanroom manufacturing. |
Содержание
1 Industrial robotics | 1 |
2 Cleanroom robotics | 12 |
3 Design of atmospheric robots | 30 |
4 Design of vacuum robots | 73 |
5 Kinematics | 124 |
6 Dynamics and control | 154 |
7 Test and characterization | 179 |
SI units and conversion tables | 220 |
Standards organizations | 223 |
Standard temperature and pressure STP | 225 |
References | 226 |
232 | |
Часто встречающиеся слова и выражения
300 mm wafers accuracy and repeatability aluminum angle applications arm link assembly atmospheric automation axes axis of motion CANopen clean cleanliness cleanroom robotics commanded path computed coordinate frame drive train elastomer electrical electronics manufacturing electropolishing Electrostatic Discharge end-effector end-effector position environments Equation example ferrofluid Figure flange flat panel display forward kinematics gas loads gaskets handling i-th industrial robots interface inverse kinematics ISO standard joint space kinematic chain lubricants magnetic materials measurement system mechanical metal belts mini-environment motor O-rings operational outgassing outgassing rate parameters particle contamination positioning accuracy prismatic joint pulley revolute joints robot arm robot base robot control rotation SCARA robots SCARA-type robot seals Sematech SEMI standard semiconductor manufacturing sensor shaft specified stainless steel standards are published substrate substrate-handling robots surface finishes temperature torque torr typical ultra-high vacuum vacuum chamber vacuum pressure vacuum robots vertical vibration virtual leaks workspace Xcmd Z-axis