Nanofabrication : Principles, Capabilities and Limits
This is a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100 nm
1 online resource (: v.: digital
9780387755779, 0387755772
311304542
Nanofabrication by Photons.- Nanofabrication by Charged Beams.- Nanofabrication by Scanning Probes.- Nanofabrication by Replication.- Nanoscale Pattern Transfer.- Indirect Nanofabrication.- Nanofabrication by Self-Assembly.